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Price: Yêu cầu báo giá
Product Categories: Deposition Controllers, Thin Film Deposition
Product Tags: 007-023, 321-039-g11, 781-600-g1, 783-500-024, ceramic retainer, f755-257-g6, inficon, thin film deposition controller, xc3s-1000, xc3s-2000
Product Page: https://dbmstore.net/san-pham/xtc-3-thin-film-deposition-controller/
Type | XTC3/S | XTC3/M | |
---|---|---|---|
Frequency Resolution | ±0.028 Hz @ 6 MHz | ±0.028 Hz @ 6 MHz | |
Measurement Frequency Range | 6.0 to 5.0 MHz (fixed) | 6.0 to 5.0 MHz (fixed) | |
Measurement Interval | 0.25 seconds | 0.25 seconds | |
Thickness & Rate Resolution / Measurement (1) | ±0.034 Å | ±0.034 Å | |
Measurement Technology | ModeLock | ModeLock | |
Number of Processes | 1 | 99 | |
Number of Layers | 1 | 999 | |
Number of Material Programs (or Films) | 9 | 32 | |
Number of Sensor Inputs | 2 | 2 | |
CrystalSix / Crystal 12 Sensor Support | Yes | Yes | |
Support XTAL 2 Switch | Yes | Yes | |
Number of Source Outputs | 2 | 2 | |
Computer Communications | RS232 standard, Ethernet TCP/IP optional | RS232 standard, Ethernet TCP/IP optional | |
Max RS232 Baud Rate | 115.2 KBaud | 115.2 KBaud | |
Automatic Crystal Switch | Yes | Yes | |
Number of Relays | 12, Not Event Assignable | 12, Event Assignable | |
Number of Programmable Relay Functions | 1 | 1 | |
Functions per Relay | 1 | 1 | |
Relay Voltage Rating | 30VDC or 30VAC RMS or 42V peak at 2.5 Amps | 30VDC or 30VAC RMS or 42V peak at 2.5 Amps | |
Number of Inputs | 8 TTL, 24VDC Max | 8 TTL, 24VDC Max | |
Number of Programmable Input Functions | 1, Not Event Assignable | 1, Event Assignable | |
Number of Recorder Outputs | 1 | 1 | |
Manual Power / Hand Held Controller | Yes | Yes | |
Exhaust Fan | No Exhaust Fan | No Exhaust Fan | |
Test Mode | Yes | Yes | |
Shutter Delay | Yes | Yes | |
Secondary Tooling | Yes | Yes | |
Case Dimensions | half rack, 2U high | half rack, 2U high | |
Rate and Thickness Display Resolution | 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A | 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A | |
Film Select via Inputs | Yes | No | |
User Guide Languages | English, Chinese | English, Chinese | |
Control Loops | PID | PID | |
Software to Operate from PC | Yes | Yes | |
Datalogging | Yes | Yes | |
Quality and Stability Function | Yes | Yes | |
Sample and Hold (RateWatcher™) | Yes | Yes | |
Crucible Selection | Yes | Yes | |
Crucible Feedback Input | Yes | Yes | |
Select Control Voltage Polarity | Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution | Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution | |
Program Lock Code | Yes | Yes | |
Display with Graphics | Yes | Yes | |
User Labeled Processes (cell phone style alphanumeric entry) | No | No | |
User Labeled Films (cell phone style alphanumeric entry) | No | No | |
Transfer Sensor Control | Yes | Yes | |
XTC/2 RS232 Communications Compatibility | Yes (limited) | Yes (limited) |
(1) Tooling/density = 100/1, fundamental frequency = 6 MHz
Tải datasheet tại đây
XTC/3 Thin Film Deposition Controller
XTC/3 là bộ điều khiển rất thông dụng của hãng INFICON, được dùng trong qúa trình lắng đọng màng mỏng.
Thiết bị này dùng phù hợp cho cả quy trình đơn hoặc đa lớp.
XTC/3 với công nghệ ModeLock đã được cấp bằng sáng chế, cho phép ngăn chặn chế độ hop thường gặp trong đo độ dày màng mỏng.
Với bộ điều khiển này, bạn có thể kiểm soát chính xác tốc độ lắng đọng và độ dày , phù hợp cho hầu hết mọi lớp, cài đặt dễ dàng với độ tin cậy cực cao để đảm bảo năng suất tốt nhất.
ƯU ĐIỂM
CÁC ỨNG DỤNG TIÊU BIỂU
Lớp phủ quang cao cấp (High End optical coatings)
Clip thực tế XTC/3S:
YouTube Video: YouTube.com/watch?v=6EYP84mbsII
Product added date: 2020-04-14 11:32:47
Product modified date: 2022-12-07 10:26:34
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