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XTC/3 Thin Film Deposition Controller

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Product Page: https://dbmstore.net/san-pham/xtc-3-thin-film-deposition-controller/

 

Product Summary

SPECIFICATIONS

Type XTC3/S XTC3/M
Frequency Resolution ±0.028 Hz @ 6 MHz ±0.028 Hz @ 6 MHz
Measurement Frequency Range 6.0 to 5.0 MHz (fixed) 6.0 to 5.0 MHz (fixed)
Measurement Interval 0.25 seconds 0.25 seconds
Thickness & Rate Resolution / Measurement (1) ±0.034 Å ±0.034 Å
Measurement Technology ModeLock ModeLock
Number of Processes 1 99
Number of Layers 1 999
Number of Material Programs (or Films) 9 32
Number of Sensor Inputs 2 2
CrystalSix / Crystal 12 Sensor Support Yes Yes
Support XTAL 2 Switch Yes Yes
Number of Source Outputs 2 2
Computer Communications RS232 standard, Ethernet TCP/IP optional RS232 standard, Ethernet TCP/IP optional
Max RS232 Baud Rate 115.2 KBaud 115.2 KBaud
Automatic Crystal Switch Yes Yes
Number of Relays 12, Not Event Assignable 12, Event Assignable
Number of Programmable Relay Functions 1 1
Functions per Relay 1 1
Relay Voltage Rating 30VDC or 30VAC RMS or 42V peak at 2.5 Amps 30VDC or 30VAC RMS or 42V peak at 2.5 Amps
Number of Inputs 8 TTL, 24VDC Max 8 TTL, 24VDC Max
Number of Programmable Input Functions 1, Not Event Assignable 1, Event Assignable
Number of Recorder Outputs 1 1
Manual Power / Hand Held Controller Yes Yes
Exhaust Fan No Exhaust Fan No Exhaust Fan
Test Mode Yes Yes
Shutter Delay Yes Yes
Secondary Tooling Yes Yes
Case Dimensions half rack, 2U high half rack, 2U high
Rate and Thickness Display Resolution 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A
Film Select via Inputs Yes No
User Guide Languages English, Chinese English, Chinese
Control Loops PID PID
Software to Operate from PC Yes Yes
Datalogging Yes Yes
Quality and Stability Function Yes Yes
Sample and Hold (RateWatcher™) Yes Yes
Crucible Selection Yes Yes
Crucible Feedback Input Yes Yes
Select Control Voltage Polarity Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution
Program Lock Code Yes Yes
Display with Graphics Yes Yes
User Labeled Processes (cell phone style alphanumeric entry) No No
User Labeled Films (cell phone style alphanumeric entry) No No
Transfer Sensor Control Yes Yes
XTC/2 RS232 Communications Compatibility Yes (limited) Yes (limited)

(1) Tooling/density = 100/1, fundamental frequency = 6 MHz

Tải datasheet tại đây

Product Description

XTC/3 Thin Film Deposition Controller

XTC/3 là bộ điều khiển rất thông dụng của hãng INFICON, được dùng trong qúa trình lắng đọng màng mỏng.

Thiết bị này dùng phù hợp cho cả quy trình đơn hoặc đa lớp.

XTC/3 với công nghệ ModeLock đã được cấp bằng sáng chế, cho phép ngăn chặn chế độ hop thường gặp trong đo độ dày màng mỏng.

Với bộ điều khiển này, bạn có thể kiểm soát chính xác tốc độ lắng đọng và độ dày , phù hợp cho hầu hết mọi lớp, cài đặt dễ dàng với độ tin cậy cực cao để đảm bảo năng suất tốt nhất.

ƯU ĐIỂM

CÁC ỨNG DỤNG TIÊU BIỂU

Lớp phủ quang cao cấp (High End optical coatings)

Clip thực tế XTC/3S:

YouTube Video: YouTube.com/watch?v=6EYP84mbsII

 

 

 

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Product added date: 2020-04-14 11:32:47
Product modified date: 2022-12-07 10:26:34

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