CDG100D (INFICON) Đầu đo chân không màng điện dung


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CDG100D là dòng Đầu đo chân không màng điện dung, chịu nhiệt cao tới 200 độ C

Đây là sự lựa chọn tốt nhất cho yêu cầu đo và kiểm soát áp suất toàn dải chính xác.

CDG100D được kiểm soát nhiệt độ ở 100 ° C cho hiệu suất vượt trội trong các quy trình bán dẫn và plasma.

Chúng đáp ứng tốt với các model sẵn cho các dải đo từ từ 100 mTorr đến 1000 Torr, với tất cả các loại mặt bích và giao diện phổ biến cung cấp tín hiệu áp suất tuyến tính 0 đến 10 V.

Áp kế điện dung INFICON sử dụng màng ngăn bằng gốm alumina siêu tinh khiết chống ăn mòn.

Ưu điểm của các dòng CDG100D

  • Cảm biến gốm giúp ổn định tín hiệu tốt hơn, phục hồi nhanh hơn từ áp suất khí quyển
  • Thời gian làm nóng ngắn và tuổi thọ tuyệt vời
  • Không phụ thuộc vào các loại khí

Ứng dụng liên quan đến bán dẫn, plasma và yêu cầu độ chính xác chân không cao.

Clip thực tế thiết bị:

Bảng chọn dòng CDG100D

SPECIFICATIONS

Type1000 … 500 Torr / mbar200 … 1 Torr / mbar0.5 … 0.1 Torr / mbar
Accuracy (1)% of reading0.20.20.4
Temperature effect
on zeropercent FS/°C0.00250.00250.005
on span% of reading / °C0.020.020.02
Pressure, max.kPa (absolute)400260130
Resolutionpercent FS0.0030.0030.003
Lowest readingpercent FS0.010.010.01
Lowest suggested readingpercent FS0.050.050.05
Lowest suggested control pressurepercent FS0.50.50.5
Temperature
Operation (ambient) (5)°C+10 … +50+10 … +50+10 … +50
Bakeout at flange°C≤110≤110≤110
Storage°C–20 … +65–20 … +65–20 … +65
Supply voltage+14 … +30 VDC or ±15 V (±5%)+14 … +30 VDC or ±15 V (±5%)+14 … +30 VDC or ±15 V (±5%)
Power consumption
During Heat upW≤15≤15≤15
At operating temperatureW≤10≤10≤10
Output signal (analog)V (dc)0 … +100 … +100 … +10
Response time (2)ms3030130 / 30 (3)
Degree of protectionIP 40IP 40IP 40
Standards
CE conformityEN 61000‑6‑2/-6-3, EN 61010 & RoHSEN 61000‑6‑2/-6-3, EN 61010 & RoHSEN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certificationUL 61010‑1, CSA 22.2 No.61010‑1UL 61010‑1, CSA 22.2 No.61010‑1UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance (5)SEMI S2SEMI S2SEMI S2
Electrical connectionD-sub, 15 pole, maleD-sub, 15 pole, maleD-sub, 15 pole, male
Setpoint
Number of setpoints2 (SP1,SP2)2 (SP1,SP2)2 (SP1,SP2)
Relay contactV (dc)
A (dc)
≤30≤30≤30
Hysteresispercent FS111
Diagnostic port
ProtocolRS232-CRS232-CRS232-C
Readpressure, status, IDpressure, status, IDpressure, status, ID
Setset points, filter, zero adjust, factory reset, DC offsetset points, filter, zero adjust, factory reset, DC offsetset points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuumAluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))
Internal volume
I. volume 1/2” tubecm³ (in.³)4.2 (0.26)4.2 (0.26)4.2 (0.26)
I. volume DN 16 ISO KFcm³ (in.³)4.2 (0.26)4.2 (0.26)4.2 (0.26)
I. volume DN 16 CF-Rcm³ (in.³)4.2 (0.26)4.2 (0.26)4.2 (0.26)
I. volume 8 VCR®cm³ (in.³)4.2 (0.26)4.2 (0.26)4.2 (0.26)
Weight
Weight 1/2” tubeg837837837
Weight DN 16 ISO KFg852852852
Weight DN 16 CF-Rg875875875
Weight 8 VCR®g897897897
EtherCAT
Protocol EtherCATprotocol specialized for EtherCATprotocol specialized for EtherCATprotocol specialized for EtherCAT
Communication standardsETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum GaugeETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum GaugeETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Node addressExplicit Device IdentificationExplicit Device IdentificationExplicit Device Identification
Physical layer100BASE-Tx (IEEE 802.3)100BASE-Tx (IEEE 802.3)100BASE-Tx (IEEE 802.3)
Digital functions readpressure, status, IDpressure, status, IDpressure, status, ID
Digital functions setset points, filter, zero adjust, reset, DC offsetset points, filter, zero adjust, factory reset, DC offsetset points, filter, zero adjust, factory reset, DC offset
Mailbox (CoE)SDO requests, responses and informationSDO requests, responses and informationSDO requests, responses and information
Process dataFixed PDO mapping and configurable PDO mappingFixed PDO mapping and configurable PDO mappingFixed PDO mapping and configurable PDO mapping
EtherCAT connector2 x RJ45, 8-pin (socket), IN and OUT2 x RJ45, 8-pin (socket), IN and OUT2 x RJ45, 8-pin (socket), IN and OUT
Cableshielded Ethernet CAT5e or highershielded Ethernet CAT5e or highershielded Ethernet CAT5e or higher
Cable lengthm (ft.)≤100 (330)≤100 (330)≤100 (330)
Signal processing timems222
DeviceNet™
ProtocolDeviceNet™, group 2 slave onlyDeviceNet™, group 2 slave onlyDeviceNet™, group 2 slave only
Data ratekBaud125, 250, 500 by switch or network programmable125, 250, 500 by switch or network programmable125, 250, 500 by switch or network programmable
Cable length 125 kbpsm (ft.)500 (1650)500 (1650)500 (1650)
Cable length 250 kbpsm (ft.)250 (825)250 (825)250 (825)
Cable length 500 kbpsm (ft.)100 (330)100 (330)100 (330)
MAC IDaddress 00 – 63 by switch or network programmableaddress 00 – 63 by switch or network programmableaddress 00 – 63 by switch or network programmable
Digital functions readpressure, status, IDpressure, status, IDpressure, status, ID
Digital functions setset points, filter, zero adjust, reset, DC offsetset points, filter, zero adjust, factory reset, DC offsetset points, filter, zero adjust, factory reset, DC offset
SpecificationDeviceNet™ “Vacuum Gauge Device Profile” (ODVA)DeviceNet™ “Vacuum Gauge Device Profile” (ODVA)DeviceNet™ “Vacuum Gauge Device Profile” (ODVA)
Device type”VG” vacuum gauge”VG” vacuum gauge”VG” vacuum gauge
I / O slave messagingpolling onlypolling onlypolling only
Supply voltage for gauge at D-sub connector+14 … +30 VDC or ±15 V / ≤12 W+14 … +30 VDC or ±15 V / ≤12 W+14 … +30 VDC or ±15 V / ≤12 W
Supply voltage for DeviceNet transceiver at microstyle connector24 V nom / <2 W (11 … 25 V)24 V nom / <2 W (11 … 25 V)24 V nom / <2 W (11 … 25 V)
Connector for DeviceNet™microstyle, 5 pin, malemicrostyle, 5 pin, malemicrostyle, 5 pin, male
Connector for CDG (analog output, supply voltage CDG, setpoints)D-sub, 15 pin, maleD-sub, 15 pin, maleD-sub, 15 pin, male
Profibus DP
Baud rateskBaud
Mbaud
9.6 / 19.2 / 93.75 / 187.5 / 5009.6 / 19.2 / 93.75 / 187.5 / 5009.6 / 19.2 / 93.75 / 187.5 / 500
Addressaddress 00 – 125 by switch or network programmableaddress 00 – 125 by switch or network programmableaddress 00 – 125 by switch or network programmable
Digital functions Readpressure, status, IDpressure, status, IDpressure, status, ID
Digital functions Setset points, filter, zero adjust, factory reset, DC offsetset points, filter, zero adjust, factory reset, DC offsetset points, filter, zero adjust, factory reset, DC offset
Connector for Profibus DPD-sub, 9 pin, femaleD-sub, 9 pin, femaleD-sub, 9 pin, female
Connector for CDG (analog output, supply voltage, setpoints)D-sub, 15 pin, maleD-sub, 15 pin, maleD-sub, 15 pin, male

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.

(2) Increase 10 … 90 percent FS

(3) For pressure control type only.

(4) 18% Cr, 10% Ni, 3% Mo, 69% Fe

(5) Ambient temperatures >40°C may increase surface temperatures above SEMI S2 compliance levels

Tải Datasheet

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