| Type |
1000 … 500 Torr / mbar |
200 … 1 Torr / mbar |
0.5 … 0.1 Torr / mbar |
| Accuracy (1) |
% of reading |
0.2 |
0.2 |
0.4 |
| Temperature effect |
|
|
|
| on zero |
percent FS/°C |
0.0025 |
0.0025 |
0.005 |
| on span |
% of reading / °C |
0.02 |
0.02 |
0.02 |
| Pressure, max. |
kPa (absolute) |
400 |
260 |
130 |
| Resolution |
percent FS |
0.003 |
0.003 |
0.003 |
| Lowest reading |
percent FS |
0.01 |
0.01 |
0.01 |
| Lowest suggested reading |
percent FS |
0.05 |
0.05 |
0.05 |
| Lowest suggested control pressure |
percent FS |
0.5 |
0.5 |
0.5 |
| Temperature |
|
|
|
| Operation (ambient) (5) |
°C |
+10 … +50 |
+10 … +50 |
+10 … +50 |
| Bakeout at flange |
°C |
≤110 |
≤110 |
≤110 |
| Storage |
°C |
–20 … +65 |
–20 … +65 |
–20 … +65 |
| Supply voltage |
|
+14 … +30 VDC or ±15 V (±5%) |
+14 … +30 VDC or ±15 V (±5%) |
+14 … +30 VDC or ±15 V (±5%) |
| Power consumption |
|
|
|
| During Heat up |
W |
≤15 |
≤15 |
≤15 |
| At operating temperature |
W |
≤10 |
≤10 |
≤10 |
| Output signal (analog) |
V (dc) |
0 … +10 |
0 … +10 |
0 … +10 |
| Response time (2) |
ms |
30 |
30 |
130 / 30 (3) |
| Degree of protection |
|
IP 40 |
IP 40 |
IP 40 |
| Standards |
|
|
|
| CE conformity |
|
EN 61000‑6‑2/-6-3, EN 61010 & RoHS |
EN 61000‑6‑2/-6-3, EN 61010 & RoHS |
EN 61000‑6‑2/-6-3, EN 61010 & RoHS |
| ETL certification |
|
UL 61010‑1, CSA 22.2 No.61010‑1 |
UL 61010‑1, CSA 22.2 No.61010‑1 |
UL 61010‑1, CSA 22.2 No.61010‑1 |
| SEMI compliance (5) |
|
SEMI S2 |
SEMI S2 |
SEMI S2 |
| Electrical connection |
|
D-sub, 15 pole, male |
D-sub, 15 pole, male |
D-sub, 15 pole, male |
| Setpoint |
|
|
|
| Number of setpoints |
|
2 (SP1,SP2) |
2 (SP1,SP2) |
2 (SP1,SP2) |
| Relay contact |
V (dc)
A (dc) |
≤30 |
≤30 |
≤30 |
| Hysteresis |
percent FS |
1 |
1 |
1 |
| Diagnostic port |
|
|
|
| Protocol |
|
RS232-C |
RS232-C |
RS232-C |
| Read |
|
pressure, status, ID |
pressure, status, ID |
pressure, status, ID |
| Set |
|
set points, filter, zero adjust, factory reset, DC offset |
set points, filter, zero adjust, factory reset, DC offset |
set points, filter, zero adjust, factory reset, DC offset |
| Materials exposed to vacuum |
|
Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) |
Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) |
Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) |
| Internal volume |
|
|
|
| I. volume 1/2” tube |
cm³ (in.³) |
4.2 (0.26) |
4.2 (0.26) |
4.2 (0.26) |
| I. volume DN 16 ISO KF |
cm³ (in.³) |
4.2 (0.26) |
4.2 (0.26) |
4.2 (0.26) |
| I. volume DN 16 CF-R |
cm³ (in.³) |
4.2 (0.26) |
4.2 (0.26) |
4.2 (0.26) |
| I. volume 8 VCR® |
cm³ (in.³) |
4.2 (0.26) |
4.2 (0.26) |
4.2 (0.26) |
| Weight |
|
|
|
| Weight 1/2” tube |
g |
837 |
837 |
837 |
| Weight DN 16 ISO KF |
g |
852 |
852 |
852 |
| Weight DN 16 CF-R |
g |
875 |
875 |
875 |
| Weight 8 VCR® |
g |
897 |
897 |
897 |
| EtherCAT |
|
|
|
| Protocol EtherCAT |
|
protocol specialized for EtherCAT |
protocol specialized for EtherCAT |
protocol specialized for EtherCAT |
| Communication standards |
|
ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge |
ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge |
ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge |
| Node address |
|
Explicit Device Identification |
Explicit Device Identification |
Explicit Device Identification |
| Physical layer |
|
100BASE-Tx (IEEE 802.3) |
100BASE-Tx (IEEE 802.3) |
100BASE-Tx (IEEE 802.3) |
| Digital functions read |
|
pressure, status, ID |
pressure, status, ID |
pressure, status, ID |
| Digital functions set |
|
set points, filter, zero adjust, reset, DC offset |
set points, filter, zero adjust, factory reset, DC offset |
set points, filter, zero adjust, factory reset, DC offset |
| Mailbox (CoE) |
|
SDO requests, responses and information |
SDO requests, responses and information |
SDO requests, responses and information |
| Process data |
|
Fixed PDO mapping and configurable PDO mapping |
Fixed PDO mapping and configurable PDO mapping |
Fixed PDO mapping and configurable PDO mapping |
| EtherCAT connector |
|
2 x RJ45, 8-pin (socket), IN and OUT |
2 x RJ45, 8-pin (socket), IN and OUT |
2 x RJ45, 8-pin (socket), IN and OUT |
| Cable |
|
shielded Ethernet CAT5e or higher |
shielded Ethernet CAT5e or higher |
shielded Ethernet CAT5e or higher |
| Cable length |
m (ft.) |
≤100 (330) |
≤100 (330) |
≤100 (330) |
| Signal processing time |
ms |
2 |
2 |
2 |
| DeviceNet™ |
|
|
|
| Protocol |
|
DeviceNet™, group 2 slave only |
DeviceNet™, group 2 slave only |
DeviceNet™, group 2 slave only |
| Data rate |
kBaud |
125, 250, 500 by switch or network programmable |
125, 250, 500 by switch or network programmable |
125, 250, 500 by switch or network programmable |
| Cable length 125 kbps |
m (ft.) |
500 (1650) |
500 (1650) |
500 (1650) |
| Cable length 250 kbps |
m (ft.) |
250 (825) |
250 (825) |
250 (825) |
| Cable length 500 kbps |
m (ft.) |
100 (330) |
100 (330) |
100 (330) |
| MAC ID |
|
address 00 – 63 by switch or network programmable |
address 00 – 63 by switch or network programmable |
address 00 – 63 by switch or network programmable |
| Digital functions read |
|
pressure, status, ID |
pressure, status, ID |
pressure, status, ID |
| Digital functions set |
|
set points, filter, zero adjust, reset, DC offset |
set points, filter, zero adjust, factory reset, DC offset |
set points, filter, zero adjust, factory reset, DC offset |
| Specification |
|
DeviceNet™ “Vacuum Gauge Device Profile” (ODVA) |
DeviceNet™ “Vacuum Gauge Device Profile” (ODVA) |
DeviceNet™ “Vacuum Gauge Device Profile” (ODVA) |
| Device type |
|
”VG” vacuum gauge |
”VG” vacuum gauge |
”VG” vacuum gauge |
| I / O slave messaging |
|
polling only |
polling only |
polling only |
| Supply voltage for gauge at D-sub connector |
|
+14 … +30 VDC or ±15 V / ≤12 W |
+14 … +30 VDC or ±15 V / ≤12 W |
+14 … +30 VDC or ±15 V / ≤12 W |
| Supply voltage for DeviceNet transceiver at microstyle connector |
|
24 V nom / <2 W (11 … 25 V) |
24 V nom / <2 W (11 … 25 V) |
24 V nom / <2 W (11 … 25 V) |
| Connector for DeviceNet™ |
|
microstyle, 5 pin, male |
microstyle, 5 pin, male |
microstyle, 5 pin, male |
| Connector for CDG (analog output, supply voltage CDG, setpoints) |
|
D-sub, 15 pin, male |
D-sub, 15 pin, male |
D-sub, 15 pin, male |
| Profibus DP |
|
|
|
| Baud rates |
kBaud
Mbaud |
9.6 / 19.2 / 93.75 / 187.5 / 500 |
9.6 / 19.2 / 93.75 / 187.5 / 500 |
9.6 / 19.2 / 93.75 / 187.5 / 500 |
| Address |
|
address 00 – 125 by switch or network programmable |
address 00 – 125 by switch or network programmable |
address 00 – 125 by switch or network programmable |
| Digital functions Read |
|
pressure, status, ID |
pressure, status, ID |
pressure, status, ID |
| Digital functions Set |
|
set points, filter, zero adjust, factory reset, DC offset |
set points, filter, zero adjust, factory reset, DC offset |
set points, filter, zero adjust, factory reset, DC offset |
| Connector for Profibus DP |
|
D-sub, 9 pin, female |
D-sub, 9 pin, female |
D-sub, 9 pin, female |
| Connector for CDG (analog output, supply voltage, setpoints) |
|
D-sub, 15 pin, male |
D-sub, 15 pin, male |
D-sub, 15 pin, male |
Đánh giá
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