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INFICON CDG100D | Đầu đo chân không màng điện dung

Price: Yêu cầu báo giá

Product Categories: Đầu đo chân không

Product Tags: 3cd1-959-2300, CDG100D, CDG160D, CDG200D, inficon, vacuum gauge

Product Page: https://dbmstore.net/san-pham/dau-do-chan-khong-mang-dien-dung-cdg100d-inficon/

Product Summary

SPECIFICATIONS

Type		1000 ... 500 Torr / mbar	200 ... 1 Torr / mbar	0.5 ... 0.1 Torr / mbar
Accuracy (1)	% of reading	0.2	0.2	0.4
Temperature effect
on zero	percent FS/°C	0.0025	0.0025	0.005
on span	% of reading / °C	0.02	0.02	0.02
Pressure, max.	kPa (absolute)	400	260	130
Resolution	percent FS	0.003	0.003	0.003
Lowest reading	percent FS	0.01	0.01	0.01
Lowest suggested reading	percent FS	0.05	0.05	0.05
Lowest suggested control pressure	percent FS	0.5	0.5	0.5
Temperature
Operation (ambient) (5)	°C	+10 … +50	+10 … +50	+10 … +50
Bakeout at flange	°C	≤110	≤110	≤110
Storage	°C	–20 … +65	–20 … +65	–20 … +65
Supply voltage		+14 … +30 VDC or ±15 V (±5%)	+14 … +30 VDC or ±15 V (±5%)	+14 … +30 VDC or ±15 V (±5%)
Power consumption
During Heat up	W	≤15	≤15	≤15
At operating temperature	W	≤10	≤10	≤10
Output signal (analog)	V (dc)	0 … +10	0 … +10	0 … +10
Response time (2)	ms	30	30	130 / 30 ⁽³⁾
Degree of protection		IP 40	IP 40	IP 40
Standards
CE conformity		EN 61000‑6‑2/-6-3, EN 61010 & RoHS	EN 61000‑6‑2/-6-3, EN 61010 & RoHS	EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification		UL 61010‑1, CSA 22.2 No.61010‑1	UL 61010‑1, CSA 22.2 No.61010‑1	UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance (5)		SEMI S2	SEMI S2	SEMI S2
Electrical connection		D-sub, 15 pole, male	D-sub, 15 pole, male	D-sub, 15 pole, male
Setpoint
Number of setpoints		2 (SP1,SP2)	2 (SP1,SP2)	2 (SP1,SP2)
Relay contact	V (dc) A (dc)	≤30	≤30	≤30
Hysteresis	percent FS	1	1	1
Diagnostic port
Protocol		RS232-C	RS232-C	RS232-C
Read		pressure, status, ID	pressure, status, ID	pressure, status, ID
Set		set points, filter, zero adjust, factory reset, DC offset	set points, filter, zero adjust, factory reset, DC offset	set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L ⁽⁴⁾)	Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L ⁽⁴⁾)	Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L ⁽⁴⁾)
Internal volume
I. volume 1/2'' tube	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)	4.2 (0.26)
I. volume DN 16 ISO KF	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)	4.2 (0.26)
I. volume DN 16 CF-R	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)	4.2 (0.26)
I. volume 8 VCR®	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)	4.2 (0.26)
Weight
Weight 1/2'' tube	g	837	837	837
Weight DN 16 ISO KF	g	852	852	852
Weight DN 16 CF-R	g	875	875	875
Weight 8 VCR®	g	897	897	897
EtherCAT
Protocol EtherCAT		protocol specialized for EtherCAT	protocol specialized for EtherCAT	protocol specialized for EtherCAT
Communication standards		ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge	ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge	ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Node address		Explicit Device Identification	Explicit Device Identification	Explicit Device Identification
Physical layer		100BASE-Tx (IEEE 802.3)	100BASE-Tx (IEEE 802.3)	100BASE-Tx (IEEE 802.3)
Digital functions read		pressure, status, ID	pressure, status, ID	pressure, status, ID
Digital functions set		set points, filter, zero adjust, reset, DC offset	set points, filter, zero adjust, factory reset, DC offset	set points, filter, zero adjust, factory reset, DC offset
Mailbox (CoE)		SDO requests, responses and information	SDO requests, responses and information	SDO requests, responses and information
Process data		Fixed PDO mapping and configurable PDO mapping	Fixed PDO mapping and configurable PDO mapping	Fixed PDO mapping and configurable PDO mapping
EtherCAT connector		2 x RJ45, 8-pin (socket), IN and OUT	2 x RJ45, 8-pin (socket), IN and OUT	2 x RJ45, 8-pin (socket), IN and OUT
Cable		shielded Ethernet CAT5e or higher	shielded Ethernet CAT5e or higher	shielded Ethernet CAT5e or higher
Cable length	m (ft.)	≤100 (330)	≤100 (330)	≤100 (330)
Signal processing time	ms	2	2	2
DeviceNet™
Protocol		DeviceNet™, group 2 slave only	DeviceNet™, group 2 slave only	DeviceNet™, group 2 slave only
Data rate	kBaud	125, 250, 500 by switch or network programmable	125, 250, 500 by switch or network programmable	125, 250, 500 by switch or network programmable
Cable length 125 kbps	m (ft.)	500 (1650)	500 (1650)	500 (1650)
Cable length 250 kbps	m (ft.)	250 (825)	250 (825)	250 (825)
Cable length 500 kbps	m (ft.)	100 (330)	100 (330)	100 (330)
MAC ID		address 00 - 63 by switch or network programmable	address 00 - 63 by switch or network programmable	address 00 - 63 by switch or network programmable
Digital functions read		pressure, status, ID	pressure, status, ID	pressure, status, ID
Digital functions set		set points, filter, zero adjust, reset, DC offset	set points, filter, zero adjust, factory reset, DC offset	set points, filter, zero adjust, factory reset, DC offset
Specification		DeviceNet™ "Vacuum Gauge Device Profile" (ODVA)	DeviceNet™ "Vacuum Gauge Device Profile" (ODVA)	DeviceNet™ "Vacuum Gauge Device Profile" (ODVA)
Device type		''VG'' vacuum gauge	''VG'' vacuum gauge	''VG'' vacuum gauge
I / O slave messaging		polling only	polling only	polling only
Supply voltage for gauge at D-sub connector		+14 … +30 VDC or ±15 V / ≤12 W	+14 … +30 VDC or ±15 V / ≤12 W	+14 … +30 VDC or ±15 V / ≤12 W
Supply voltage for DeviceNet transceiver at microstyle connector		24 V nom / <2 W (11 … 25 V)	24 V nom / <2 W (11 … 25 V)	24 V nom / <2 W (11 … 25 V)
Connector for DeviceNet™		microstyle, 5 pin, male	microstyle, 5 pin, male	microstyle, 5 pin, male
Connector for CDG (analog output, supply voltage CDG, setpoints)		D-sub, 15 pin, male	D-sub, 15 pin, male	D-sub, 15 pin, male
Profibus DP
Baud rates	kBaud Mbaud	9.6 / 19.2 / 93.75 / 187.5 / 500	9.6 / 19.2 / 93.75 / 187.5 / 500	9.6 / 19.2 / 93.75 / 187.5 / 500
Address		address 00 - 125 by switch or network programmable	address 00 - 125 by switch or network programmable	address 00 - 125 by switch or network programmable
Digital functions Read		pressure, status, ID	pressure, status, ID	pressure, status, ID
Digital functions Set		set points, filter, zero adjust, factory reset, DC offset	set points, filter, zero adjust, factory reset, DC offset	set points, filter, zero adjust, factory reset, DC offset
Connector for Profibus DP		D-sub, 9 pin, female	D-sub, 9 pin, female	D-sub, 9 pin, female
Connector for CDG (analog output, supply voltage, setpoints)		D-sub, 15 pin, male	D-sub, 15 pin, male	D-sub, 15 pin, male

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.

(2) Increase 10 … 90 percent FS

(3) For pressure control type only.

(4) 18% Cr, 10% Ni, 3% Mo, 69% Fe

(5) Ambient temperatures >40°C may increase surface temperatures above SEMI S2 compliance levels

Tải Datasheet

Product Description

CDG100D là dòng Đầu đo chân không màng điện dung, chịu nhiệt cao tới 200 độ C

Đây là sự lựa chọn tốt nhất cho yêu cầu đo và kiểm soát áp suất toàn dải chính xác.

CDG100D được kiểm soát nhiệt độ ở 100 ° C cho hiệu suất vượt trội trong các quy trình bán dẫn và plasma.

Chúng đáp ứng tốt với các model sẵn cho các dải đo từ từ 100 mTorr đến 1000 Torr, với tất cả các loại mặt bích và giao diện phổ biến cung cấp tín hiệu áp suất tuyến tính 0 đến 10 V.

Áp kế điện dung INFICON sử dụng màng ngăn bằng gốm alumina siêu tinh khiết chống ăn mòn.

Ưu điểm của các dòng CDG100D

Cảm biến gốm giúp ổn định tín hiệu tốt hơn, phục hồi nhanh hơn từ áp suất khí quyển
Thời gian làm nóng ngắn và tuổi thọ tuyệt vời
Không phụ thuộc vào các loại khí

Ứng dụng liên quan đến bán dẫn, plasma và yêu cầu độ chính xác chân không cao.

DBM Co., ltd là nhà phân phối ủy quyền hãng INFICON từ 2015 đến nay, nên chúng tôi không chỉ cung cấp sản phẩm chính hãng mà còn kiêm luôn dịch vụ sửa chữa – bảo hành ngay tại Việt Nam.

Thông tin chi tiết, tham chiếu tại đây ¹

Clip thực tế thiết bị:

YouTube Video: YouTube.com/watch?v=-pRJnArheUA ²

Bảng chọn dòng CDG100D